I've been planning to make a maskless wafer stepper for a long time. In the last few months, I finally found the time! This video is the first of 3 video's on the design- and build process. It discusses the optical aspects of the machine.

0:00 General intro
0:38 About Wafer steppers in general
1:12 Meta surfaces and flat optics
2:00 Principle and advantages of a maskless wafer stepper
4:36 Projection optics
6:47 Global layout of the machine
8:50 System overview

I hope to make micro optics with this machine in the near future. By the way, not the standard meta surfaces, because the resolution will be too limited for that, but meta surfaces that combine both refractive and diffractive functionality. Currently I'm still in the building process of the machine and the software.

I have taken the liberty of using a few short clips in my video. Please give the makers credit by visiting the original video's or websites if you are want to know more:  
ASML video on EUV-wafer steppers:
https://www.youtube.com/watch?v=jH6Urfqt_d4
Great video by science magazine with entry level info on meta surfaces
https://www.youtube.com/watch?v=ETx_fjM5pms
If you want to go a little deeper:
https://www.youtube.com/watch?v=RBGwJE0ww7s
https://www.youtube.com/watch?v=3qeE5A8HIWY
https://www.youtube.com/watch?v=AM4yO0mjR4g

By the way, the Nikon objective was bought at https://www.ebay.nl/usr/avr-sales. They gave me a very good price and exceptional service, so make sure to check them out for used tech stuff.

This video is the 2nd of 3 video's on the design and build process of a small maskless wafer stepper.  It discusses the mechanical aspects of the machine, in particular the challenges that I face to achieve the requirements.  

0:00 General intro
1:18 First devices (Fresnel zone plates)
3:28 Mechanical system (wafer stage / focusser)
7:49 Position and lead screw linearity
10:09 Determining straightness and perpendicularity (squareness)
11:45 Z-axis positioning using a piezo actuator

I also show some crude footage of the first optically active devices. Sorry about the image quality, I will get back with more detailed images in future videos. The idea is to make  micro optics with this machine.

More theory on the fresnel lens / zone plate can be found on : http://zoneplate.lbl.gov/theory

Choreography at 6:03 minutes by Fermat CNC machining:
https://www.youtube.com/watch?v=5FmaAkXqVTI

The end of this video contains a short clip from the rock-mockumentary  "Spinal Tap" at 13:41.  If you want to know why it is important to have controllers going all the way up to 11 in your equipment, please see the original video clip:  https://www.youtube.com/watch?v=4xgx4k83zzc

3D-принтер DragonFly – революция в изготовлении многослойных печатных плат - статья от ГК Остек. Еще больше полезной информации в разделе "База знаний" на нашем сайте.